Evaporation
Product lines ME and MEB

• Lift-off processes
• HMET, PHMET transistors
• IR waveguides
• Thermal barriers
• Magnetic materials
• MEMS encapsulation
• Josephson circuits

Sputtering
Product line MP

• Monolayers
• Multilayers
• Magnetic films
• Optic films
• Reactive sputtering

Diamond growth by MW-PACVD

• Electronic grade CVD diamond
• High growth rates
• Doping with nitrogen or boron
• Monocrystal (electronic or gem grade) and polycrystal
• 2.45 GHz – 6 kW

Special application and production machines

• Deposition of DLC
• Interface depostion
• Multi-substrate processing
• 24-7 up time and throughput
• Perfect reproducibility

Qubit multi-chamber systems

• Qubits
• Multi-technology integration

Glove box integrated systems

• Organic materials
• Sensors
• Add-on to existing machines