Evaporation HV/UHV
Sputtering systems HV/UHV
Ion milling
Diamond growth by MW-PACVD
Special and production machines
Qubit multi-chamber systems
Glove box integrated systems
Software control
Evaporation Product lines ME and MEB
Sputtering Product line MP
Ion milling Product lines MG and MU
Special application and production machines
Systems for quantum applications