Evaporation
Product lines ME and MEB

  • Lift-off processes
  • HMET, PHMET transistors
  • IR waveguides
  • Thermal barriers
  • Magnetic materials
  • MEMS encapsulation
  • Josephson circuits

Sputtering
Product line MP

  • Monolayers
  • Multilayers
  • Magnetic films
  • Optic films
  • Reactive sputtering

Ion milling
Product lines MG and MU

  • M-RAM
  • Interfaces
  • Micro tips

Diamond growth by MW-PACVD

  • Electronic grade CVD diamond
  • High growth rates
  • Doping with nitrogen or boron
  • Monocrystal (electronic or gem grade) and polycrystal
  • 2.45 GHz – 6 kW

Special application and production machines

  • Deposition of DLC
  • Interface depostion
  • Multi-substrate processing
  • 24-7 up time and throughput
  • Perfect reproducibility

Qubit multi-chamber systems

  • Qubits
  • Multi-technology integration

Glove box integrated systems

  • Organic materials
  • Sensors
  • Add-on to existing machines

Software control

  • System drive and control via PC
  • Windows 7 with back-up
  • Multi-user, multi-level