Ion milling, RIBE, CAIBE

  • ICP sources – 14 or 20 cm beam size
  • Current density up to 4 mA/cm2
  • Energy range from 100 to 1000 eV

Automatic pumping unit

  • Dry pump or oil rotary pump
  • Turbomolecular pump with ceramic or magnetic bearings
  • Cryogenic pump

Sample holder

  • Tiltable substrate holder with planetary rotation and water cooling

Manual or automatic load-lock

Etch finish detectors

  • Laser interferometer
  • SIMS

Applications

  • M-RAM
  • Transitional metal treatment
  • MEMS & NEMS
Contact us