Diamond growth by MW-PACVD

SSDR 150 is a microwave plasma-assisted CVD ( MW-PACVD) reactor dedicated to diamond film and gem synthesis. Being the fruitful result of thorough R&D work, this reactor uses high power density plasma to provide high purity diamond films at a high growth rate. Because of its optimized microwave and plasma design, the SSDR 150 reactor is a reliable and robust equipment, perfectly adjusted to  the needs of both R&D labs and industry. Its easy to clean and change bell jar configuration makes the SSDR 150 especially suitable for doped diamond films.

Reactor characteristics

  • High power density plasma
  • High operating pressure up to 400 mbar or more
  • 6 kW micro-wave generator (switch mode power supply)
  • 4 gas lines (additional lines on request)
  • 2” substrate holder
  • Automatic height adjustment of the substrate carrier during growth (optional)
  • Substrate spinning during growth (optional)
  • Easy substrate loading/unloading
  • Bichromatic IR pyrometer (475 – 1475 ° C)
  • Turbo molecular pump + dry primary pump
  • Basic reactor pressure: 2×10-7 mbar
  • Fully automated process
  • Low maintenance

Performance of the SSDR150 reactor

Polycristalline diamond

  • No visible nitrogen in PL @ liquid nitrogen temperature

Monocrystalline diamond

  • No nitrogen centers visible in PL @ liquid nitrogen temperature
  • Low concentration of single substitutional nitrogen [NS0] (as measured by EPR)
  • FWHM of the Raman diamond  line at 1332 cm-1 : 1.6 cm-1
  • No infrared absorption from 4000 to 10000 cm-1
  • Growth rate up to 10 µm/h, depending on the growth conditions

Selection of articles from prestigious institutions that trusted our systems for the growth of their CVD diamond crystals:

  1. Microwave engineering of plasma-assisted CVD reactors for diamond deposition


  1. Growth of large size diamond single crystals by plasma assisted chemical vapour deposition: Recent achievements and remaining challenges


  1. 2D inverse periodic opal structures in single crystal diamond with incorporated silicon-vacancy color centers


  1. Thermal conductivity of free-standing CVD diamond films by growing on both nuclear and growth sides


  1. Thin large area vertical Schottky barrier diamond diodes with low on-resistance made by ion-beam assisted lift-off technique


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