Multi-chamber cluster systems
All our machines are compatible with integration in a multi-chamber cluster for multi-technology applications. The transfer between chambers is ensured by rods and/or articulated arms and both mechanisms are available in manual or automatic mode. Valve operation (open/close) is automatically managed by the system depending on state of the chambers and the position of the transfer arms.
Any geometric configuration is possible: in-line, in-angle, starfish shape, etc. We are surely able to propose you a setup that fits your technological and footprint criteria.