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Evaporation

• Box coater with front door, cylindrical chamber
• Loadlock with substrate treatment (plasma, ion gun, heating...)
• Up to 6" mono or multiple substrates
• Resistive (Joule), electron beam or inductive sources
• Basic, heating, cooling, rotating or oscillating, LN2 sample holders
• Ion gun for sample milling or IAD
• Semi-automatic or automatic systems with industrial computer

• A few applications

• Any lift-off process
• HMET, PHMET Transistors
• Ohmic and Schottky contacts on GaN
• IR wave guide
• Thermal barriers
• Magnetic materials for microwave applications
• MEMS encapsultion
• Josephson circuit